Dual-chamber MBE system for group III-arsenides
Growth chamber for group III-arsenides
CreaTec
Sources for Al, Ga, In, As, Si, Be
2" maximum substrate size
8 cell ports
RHEED
Growth chamber for arsenides
Meca 2000
Sources for Al, Ga, In, As, Au, Mn
2" maximum substrate size
6 cell ports
RHEED
Reflectance anisotropy spectroscopy (RAS)

