MBE chamber for phase change materials
Epitaxy of GeSbTe on GaSb
The second MBE machine is optimized for the growth of metals and compound semiconductors. It is currently growing phase change materials.
It does not have a turbo pump and is equipped with ion pumps only. It has a smaller two-chamber transfer system in which the middle and buffer chambers are combined into one to save space. The load-lock chamber is equipped with a sputter source that allows capping of as-grown layers to stabilize them for transport in air.
