CL spectroscopy laboratory
The cathodoluminescence (CL) laboratory combines a field-emission-gun scanning electron microscope (SEM) with a CL system and a He-cooling stage (6–300 K). The experiments performed consist of spatially resolved optical spectroscopy of semiconductor layers and micro- as well as nanostructures. The advantage of CL spectroscopy in an SEM is the possibility to simultaneously acquire other signals, e.g., secondary electrons (SE) or electron beam induced current (EBIC) in addition to the CL spectrum or intensity, while the electron beam scans a certain region of the sample. Thus, different properties such as the surface morphology and electrical properties can be directly compared to the CL distribution. Furthermore, due to the high energy of the electron beam, CL is particularly well suited for the investigation of wide-gap materials.
Click here for the specifications of the CL laboratory
Example
- CL spectrum and CL images of a single GaN/(Al,Ga)N nanocolumn

