CL Specifications

Electron beam excitation

• Acceleration voltage (0.1–30 keV)
• Beam current (0.1–40 nA)

Spectral analysis and detection of the CL

• Single spectrometer (300 mm)
• GaAs photomultiplier (200–900 nm)
• InP/InGaAs photomultiplier (300 – 1700 nm)
• Charge-coupled device (200–1100 nm)

Operation modes

• Monochromatic CL imaging (spectral range: 200–1700 nm)
• Spatially resolved spectrum acquisition (spectral range: 200–1100 nm)
• Simultaneous acquisition of CL, SE, and EBIC images