Integrated acousto-NEMS on monolithic new-nitride thin films

This project aims to explore the synthesis of novel aluminium transition-metal nitride materials for the development of an integrated surface acoustic wave (SAW) - nanoelectromechanical system (NEMS) platform.

Incorporation of Sc significantly enhances the piezoelectric performance of AlN, a material commonly used for high-frequency microwave electronics. By replacing the existing Sc with other carefully selected types of transition metals, the economic footprint will be significantly reduced and CMOS compatibility can be achieved. Based on these new materials, innovations under extreme conditions will be pursued, ranging from phononic platforms at millikelvin temperatures for quantum application, to sensors operating in harsh environments above 500 °C.

The project is funded within the framework of DFG Priority Programme SPP 2477 “Nitrides4Future – Novel Materials and Device Concepts”, with Project Number 563184308.