MBJ4 (Süss Microtec), MA 6 (Süss Microtec)

MBJ4

• Maximum substrate/ mask size : 4 inch/ 5 inch
• Wavelength of light: 365nm - 405nm (UV 400) 
• Resolution: 0.7μm 

MA 6 (Süss Microtec)

• Maximum substrate/ mask size : 6 inch/ 7 inch
• Wavelength of light: 248 nm (deep UV)
• Resolution: 0.5μm