1. Home
  2. PDI
  3. Facilities
  4. Focused Ion Beam (FIB) laboratory

Focused Ion Beam (FIB) laboratory

The microstructure department exploits the versatility of a dual beam SEM-FIB system for TEM specimen preparation.

The combination of the scanning electron and the focused ion beam microscope (SEM and FIB) in one vacuum chamber equipped with a micromanipulator and a gas injection system for electron/ion beam induced deposition enables the preparation of TEM specimen by the lift-out procedure from bulky sample material. This method allows to select a target on the sample and to purposefully orientate the specimen according to crystallographic and geometric demands. A special focus is established with regard to specimen preparation for electron tomography. Beside the target preparation and sample orientation, the capability to adequately shape the specimen is a prerequisite for tomographic investigations in the TEM, i.e., ideally needle shaped specimen with a diameter of 100 nm or less are requested.