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(Si,Ge,Sn)O2-based ultra-wide bandgap semiconductors for power electronics (SiGOPE)

01/02/2022 - 31/12/2025

Fig 1. Diagram indicating the parameter window for the growth of GeO2 thin films by molecular beam epitaxy.
Source: https://doi.org/10.1063/5.0155869

Fig 2. Photographs of undoped and doped rutile GeO2 wafers grown by project partner IKZ.
Source: https://doi.org/10.1002/pssb.202400326

A major challenge for a sustainable society is to ensure an economical consumption of energy. Electrical energy is a major part of today’s energy consumption and its fraction will continue to grow with increasing electro-mobility and digitalization of societies worldwide. This project aims to investigate the novel semiconductor material rutile-GeO2 and its applications in power electronics for the development of more efficient high voltage switches. Such devices are ubiquitously used for in the electrical grid as well as electro mobility. By increasing their efficiency this project might constitute a pathway to energy saving and thus provide a significant contribution to a sustainable digital society.

While the ultrawide-bandgap semiconductor Ga2O3 is the currently widely-investigated top candidate for such devices (predicted to outperform even SiC and GaN), rutile-GeO2 has recently been predicted to provide a further efficiency increase over Ga2O3. This performance increment is based on a higher dielectric constant, thermal conductivity, and predicted electron mobility in GeO2 than Ga2O3 at similar bandgaps (Eg=4.7 eV) for both materials. Importantly, the possibility of p-type conductivity, absent in Ga2O3, has been predicted for rutile GeO2 and opens up this material for bipolar devices. The related rutile oxides SnO2 (semiconductor, Eg=3.6 eV) and SiO2 (insulator, Eg~8 eV) bear the potential for band-gap engineering by alloying with GeO2 for the realization of heterostructure devices (e.g., high-electron mobility field effect transistors for high-voltage and high-frequency operation) and wavelength-tunable, solar-blind UV detectors. 

In this project we want to explore the potential of the (Sn,Ge,Si)O2 system as novel ultrawide-bandgap semiconductor with application perspectives in power electronics and UV sensing in mind, benefiting from the complementary expertise of the project partners. Starting from growth and fundamental investigations (bulk GeO2 substrates grown at IKZ; epitaxial, doped GeO2, (Si,Ge)O2, and (Sn,Ge)O2 films grown at PD)) the final goal is the realization of a GeO2-based demonstrator power electronic device (Schottky diode or lateral field-effect transistor at FBH). TEM investigations at IKZ will clarify the microstructure and formed phases, which is particularly important for the alloy system.

Funded through the Leibniz Competition Program Collaborative Excellence in partnership with Leibniz-Institut für Kristallzüchtung (IKZ) and Ferdinand-Braun-Institut, Leibniz-Institut für Höchstfrequenztechnik (FBH).


Contacts

Selected Publications

Title
Bulk Single Crystals and Physical Properties of Rutile GeO2 for High-Power Electronics and Deep-Ultraviolet Optoelectronics
Authors
Zbigniew Galazka, Roberts Blukis, Andreas Fiedler, Saud Bin Anooz, Jijun Zhang, Martin Albrecht, Thilo Remmele, Tobias Schulz, Detlef Klimm, Mike Pietsch, Albert Kwasniewski, Andrea Dittmar, Steffen Ganschow, Uta Juda, Karoline Stolze, Manuela Suendermann, Thomas Schroeder, Matthias Bickermann 
Source
Physica Status Solidi (b), 2400326
DOI: https://doi.org/10.1002/pssb.202400326

  1. Title

    Kinetics, thermodynamics, and catalysis of the cation incorporation into GeO2, SnO2, and (SnxGe1-x)O2 during suboxide MBE

    Author
    W. Chen, K. Egbo, J. Kler, A. Falkenstein, J. Lähnemann, O. Bierwagen
    Source
    APL Mater., 13, 011107 (2025)
    DOI:
    10.1063/5.0243858 (PDI-ID: 3035)
  2. Title

    Etching of elemental layers in oxide molecular beam epitaxy by O2-assisted formation and evaporation of their volatile (sub)oxide: The examples of Ga and Ge

    Author
    W. Chen, K. Egbo, H. Zhang, A. Ardenghi, O. Bierwagen
    Source
    J. Vac. Sci. Technol. A, 42, 032708 (2024)
    DOI:
    doi: 10.1116/6.0003453 (PDI-ID: 2951)
  3. Title

    In situ study and modeling of the reaction kinetics during molecular beam epitaxy of GeO2 and its etching by Ge

    Author
    W. Chen, K. Egbo, H. Tornatzky, M. Ramsteiner, M. R. Wagner, O. Bierwagen
    Source
    APL Mater., 11, 071110 (2023)
    DOI:
    10.1063/5.0155869 (PDI-ID: 2930)